Browsing by Author Solodukha, V. A.
Showing results 1 to 3 of 3
| Issue Date | Title | Author(s) |
| 2017 | Depth Measurement of Nanoscale Damage to the Surface of Silicon Wafers in the Production of Submicron Integrated Microcircuits by Auger Spectroscopy Method | Solodukha, V. A.; Shvedov, S. V.; Chyhir, R. R.; Petlitsky, A. N. |
| 2017 | Depth Measurement of the Nano-dimensional Surface Damages of the Silicon Wafers in Production of the Submicron Integrated Circuits | Solodukha, V. A.; Shvedov, S. V.; Chyhir, R. R.; Petlitsky, A. N.; Petlitskaya, T. V. |
| 2017 | Reliability Assessment of the Nano-dimensional Dielectrics of the Submicron Microcircuits | Solodukha, V. A.; Shvedov, S. V.; Chyhir, R. R.; Petlitsky, A. N.; Filipenya, V. A. |
