| DC Field | Value | Language |
|---|
| dc.contributor.author | Biran, S. A. | - |
| dc.contributor.author | Korotkevich, D. A. | - |
| dc.contributor.author | Korotkevich, A. V. | - |
| dc.date.accessioned | 2017-12-08T08:29:05Z | - |
| dc.date.available | 2017-12-08T08:29:05Z | - |
| dc.date.issued | 2017 | - |
| dc.identifier.citation | Biran, S. A. Mechanical properties of MEMS components based on anodic aluminum oxide / S. Biran, D. Korotkevich, A. Korotkevich // Nano-design, technology, computer simulations : proceedings of 17th International workshop on new approaches to high –tech (26-27 October, 2017). – Minsk : BSUIR, 2017. – С. 46 - 49. | ru_RU |
| dc.identifier.uri | https://libeldoc.bsuir.by/handle/123456789/28415 | - |
| dc.language.iso | en | ru_RU |
| dc.publisher | БГУИР | ru_RU |
| dc.subject | материалы конференций | ru_RU |
| dc.subject | mechanical properties | ru_RU |
| dc.subject | MEMS | ru_RU |
| dc.subject | anodic aluminum oxide | ru_RU |
| dc.title | Mechanical properties of MEMS components based on anodic aluminum oxide | ru_RU |
| dc.type | Статья | ru_RU |
| Appears in Collections: | NDTCS 2017
|
