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Please use this identifier to cite or link to this item: https://libeldoc.bsuir.by/handle/123456789/29058
Title: Calculating and modeling of integrated displacement systems for precision equipment of micro- and nanoelectronics
Authors: Dainiak, I.
Kuznetsov, V.
Karpovich, S.
Keywords: материалы конференций
integrated displacement systems
precision equipment
microelectronics
nanoelectronics
Issue Date: 2017
Publisher: БГУИР
Citation: Dainiak, I. Calculating and modeling of integrated displacement systems for precision equipment of micro- and nanoelectronics / I. Dainiak, V. Kuznetsov, S. Karpovich // Nano-design, technology, computer simulations : proceedings of 17th International workshop on new approaches to high –tech (26-27 October, 2017). – Minsk : BSUIR, 2017. – С. 161 - 164.
URI: https://libeldoc.bsuir.by/handle/123456789/29058
Appears in Collections:NDTCS 2017

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