https://libeldoc.bsuir.by/handle/123456789/31650| Title: | Формирование ямок на поверхности Si (111) при термообработке структур Si/Al |
| Other Titles: | Formation of dimples on the Si (111) surface during heat treatment of Si/Al structures |
| Authors: | Ходарина, Л. П. Зеленин, В. А. Гурский, Л. И. |
| Keywords: | доклады БГУИР |
| Issue Date: | 2009 |
| Publisher: | БГУИР |
| Citation: | Ходарина, Л. П. Формирование ямок на поверхности Si (111) при термообработке структур Si/Al / Л. П. Ходарина, В. А. Зеленин, Л. И. Гурский // Доклады БГУИР. - 2009. - № 3 (41). - С. 73 - 78. |
| Abstract: | The paper discusses the mechanisms responsible for formation of dimples on the Si (111) surface during heat treatment of Si/Al structures. The determination is made of the major regularities of their formation in actual structures. |
| URI: | https://libeldoc.bsuir.by/handle/123456789/31650 |
| Appears in Collections: | №3 (41) |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Khodarina_Formation.PDF | 1.3 MB | Adobe PDF | View/Open |
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