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Browsing by Author Bordusov, S. V.

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Issue DateTitleAuthor(s)
2019Output current control system of high voltage electric pulse generator for plasma excitationGodun, D. V.; Bordusov, S. V.; Budzko, G. P.
2018Output current control system of high voltage electric pulse generator for plasma excitationGodun, D. V.; Bordusov, S. V.; Budzko, G. P.
2017The influence of microwave CF4 plasma activation on the characteristics of reactive ion etching of mono-SiBordusov, S. V.; Madveika, S.; Lushakova, M.; Kovalchuk, N.
2015Theoretical analysis of low vacuum microwave discharge exciting and maintaining conditions in resonator type plasmatronMadveika, S. I.; Bordusov, S. V.