https://libeldoc.bsuir.by/handle/123456789/29140| Title: | Sol-gel coatings for photolithography on nanoporous anodic alumina and aluminum |
| Authors: | Khoroshko, L. S. Orekhovskaya, T. I. Meledina, M. V. |
| Keywords: | публикации ученых;microstructures fabrication;planar optoelectronics |
| Issue Date: | 2017 |
| Publisher: | World Scientific Press |
| Citation: | Khoroshko, L. S. Sol-gel coatings for photolithography on nanoporous anodic alumina and aluminum / L.S. Khoroshko, T.I. Orekhovskaya, M.V. Meledina // Nanomeeting – 2017 Proceedings of International Conference in Physics, Chemistry and Application of Nanostructures. – Singapore: World Scientific Press, 2017. – Р. 398 – 401. – DOI: https://doi.org/10.1142/9789813224537_0092. |
| Abstract: | The results of the patterned microstructures fabrication through electrochemical anodizing, sol-gel synthesis, photolithography and chemical etching are presented. The continuous xerogel films were used as a protective mask. They are good alternative to metal in photolithography. Perspectives of application of these structures in planar optoelectronics are discussed. |
| URI: | https://libeldoc.bsuir.by/handle/123456789/29140 |
| Appears in Collections: | Публикации в зарубежных изданиях |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Khoroshko_Sol.pdf | 127.82 kB | Adobe PDF | View/Open |
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