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Browsing by Subject ferroelectric capacitors

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Issue DateTitleAuthor(s)
2025Back-end-of-line compatible Hf0.5Zr0.5O2 ferroelectric devices enabled by microwave annealingYinchi Liu; Hao Zhang; Jining Yang; Golosov, D. A.; Xiaohan Wu; Chenjie Gu; Shijin Ding; Wenjun Liu