| DC Field | Value | Language |
|---|
| dc.contributor.author | Solodukha, V. A. | - |
| dc.contributor.author | Shvedov, S. V. | - |
| dc.contributor.author | Chyhir, R. R. | - |
| dc.contributor.author | Petlitsky, A. N. | - |
| dc.contributor.author | Petlitskaya, T. V. | - |
| dc.date.accessioned | 2017-12-20T08:17:49Z | - |
| dc.date.available | 2017-12-20T08:17:49Z | - |
| dc.date.issued | 2017 | - |
| dc.identifier.citation | Depth Measurement of the Nano-dimensional Surface Damages of the Silicon Wafers in Production of the Submicron Integrated Circuits / V. A. Solodukha and other // 10th International Conference «New Electrical and Electronic Technologies and their Industrial Implementation» (June 27 – 30, 2017). – Zakopane. – Р. 25. | ru_RU |
| dc.identifier.uri | https://libeldoc.bsuir.by/handle/123456789/28807 | - |
| dc.language.iso | en | ru_RU |
| dc.publisher | Zakopane | ru_RU |
| dc.subject | публикации ученых | ru_RU |
| dc.title | Depth Measurement of the Nano-dimensional Surface Damages of the Silicon Wafers in Production of the Submicron Integrated Circuits | ru_RU |
| dc.type | Статья | ru_RU |
| Appears in Collections: | Публикации в зарубежных изданиях
|
