| DC Field | Value | Language |
|---|
| dc.contributor.author | Khoroshko, L. S. | - |
| dc.contributor.author | Orekhovskaya, T. I. | - |
| dc.contributor.author | Meledina, M. V. | - |
| dc.date.accessioned | 2018-01-10T13:03:40Z | - |
| dc.date.available | 2018-01-10T13:03:40Z | - |
| dc.date.issued | 2017 | - |
| dc.identifier.citation | Khoroshko, L. S. Sol-gel coatings for photolithography on nanoporous anodic alumina and aluminum / L.S. Khoroshko, T.I. Orekhovskaya, M.V. Meledina // Nanomeeting – 2017 Proceedings of International Conference in Physics, Chemistry and Application of Nanostructures. – Singapore: World Scientific Press, 2017. – Р. 398 – 401. – DOI: https://doi.org/10.1142/9789813224537_0092. | ru_RU |
| dc.identifier.uri | https://libeldoc.bsuir.by/handle/123456789/29140 | - |
| dc.description.abstract | The results of the patterned microstructures fabrication through electrochemical anodizing, sol-gel synthesis, photolithography and chemical etching are presented. The continuous xerogel films were used as a protective mask. They are good alternative to metal in photolithography. Perspectives of application of these structures in planar optoelectronics are discussed. | ru_RU |
| dc.language.iso | en | ru_RU |
| dc.publisher | World Scientific Press | ru_RU |
| dc.subject | публикации ученых | ru_RU |
| dc.subject | microstructures fabrication | ru_RU |
| dc.subject | planar optoelectronics | ru_RU |
| dc.title | Sol-gel coatings for photolithography on nanoporous anodic alumina and aluminum | ru_RU |
| dc.type | Статья | ru_RU |
| Appears in Collections: | Публикации в зарубежных изданиях
|
