| DC Field | Value | Language |
|---|
| dc.contributor.author | Panfilenko, E. D. | - |
| dc.contributor.author | Provlockaya, D. V. | - |
| dc.coverage.spatial | Минск | en_US |
| dc.date.accessioned | 2026-07-21T13:40:26Z | - |
| dc.date.available | 2026-07-21T13:40:26Z | - |
| dc.date.issued | 2026 | - |
| dc.identifier.citation | Panfilenko, E. D. Influence of pretreatment methods on the formation of thin-film nickel electrodes for capacitive sensors / E. D. Panfilenko, D. V. Provlockaya // Электронные системы и технологии : сборник материалов 62-й научной конференции аспирантов, магистрантов и студентов БГУИР, Минск, 13–17 апреля 2026 г. / Белорусский государственный университет информатики и радиоэлектроники ; редкол.: П. В. Камлач [и др.]. – Минск, 2026. – С. 831–835. | en_US |
| dc.identifier.uri | https://libeldoc.bsuir.by/handle/123456789/64807 | - |
| dc.description.abstract | The paper investigates the influence of pretreatment methods for sitall ST-50-1-1-0,6 substrates surface on the subsequent formation of thin-film nickel electrodes for capacitive sensors for heavy metal ions detection in water. A comparison of two cleaning methods was carried out: ion-beam cleaning in vacuum and treatment in a dielectric barrier discharge plasma torch at atmospheric pressure. Optimal cleaning regimes ensuring maximum adhesion and quality of the formed films were established. Nickel films with a thickness of 100 nm were obtained by ion-beam sputtering; their optical properties and surface morphology were studied. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | БГУИР | en_US |
| dc.subject | материалы конференций | en_US |
| dc.subject | thin films | en_US |
| dc.subject | nickel | en_US |
| dc.subject | sitall | en_US |
| dc.subject | ion-beam sputtering | en_US |
| dc.subject | atmospheric pressure plasma | en_US |
| dc.subject | surface cleaning | en_US |
| dc.subject | capacitive sensors | en_US |
| dc.title | Influence of pretreatment methods on the formation of thin-film nickel electrodes for capacitive sensors | en_US |
| dc.type | Article | en_US |
| Appears in Collections: | Электронные системы и технологии : материалы 62-й конференции аспирантов, магистрантов и студентов (2026)
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