| DC Field | Value | Language |
|---|
| dc.contributor.author | Bely, G. V. | - |
| dc.contributor.author | Lopato, U. P. | - |
| dc.contributor.author | Bondarenko, V. P. | - |
| dc.contributor.author | Grevtsov, N. L. | - |
| dc.contributor.author | Chubenko, E. B. | - |
| dc.coverage.spatial | Germany | en_US |
| dc.date.accessioned | 2026-11-03T11:34:25Z | - |
| dc.date.available | 2026-11-03T11:34:25Z | - |
| dc.date.issued | 2026 | - |
| dc.identifier.citation | Formation of a dielectric material derived from oxidized porous silicon and titanium oxide for integrated optical waveguides / G. V. Bely, U. P. Lopato, V. P. Bondarenko [et al.] // Journal of Applied Spectroscopy. – 2026. – Vol. 93, No. 4. – P. 817–823. | en_US |
| dc.identifier.uri | https://libeldoc.bsuir.by/handle/123456789/66049 | - |
| dc.description.abstract | Feasibility is demonstrated for obtaining a dielectric material derived from oxidized porous silicon and titanium oxide by depositing the latter onto porous silicon using a sol-gel method followed by high-temperature oxidation. The resulting dielectric material has an enhanced refractive index, making it promising for creating low-loss integrated optical channel waveguides in bulk microassemblies of electronic circuits with optical interconnects. | en_US |
| dc.language.iso | en | en_US |
| dc.publisher | Springer Nature | en_US |
| dc.subject | публикации ученых | en_US |
| dc.subject | porous silicon | en_US |
| dc.subject | silicon oxide | en_US |
| dc.subject | titanium oxide | en_US |
| dc.subject | sol-gel method | en_US |
| dc.subject | thermal oxidation | en_US |
| dc.subject | refractive index | en_US |
| dc.subject | optical waveguide | en_US |
| dc.title | Formation of a dielectric material derived from oxidized porous silicon and titanium oxide for integrated optical waveguides | en_US |
| dc.type | Article | en_US |
| dc.identifier.DOI | DOI 10.1007/s10812-026-02154-6 | - |
| Appears in Collections: | Публикации в зарубежных изданиях
|
