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Please use this identifier to cite or link to this item: https://libeldoc.bsuir.by/handle/123456789/6777
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dc.contributor.authorGolosov, D. A.-
dc.contributor.authorMelnikov, S. N.-
dc.contributor.authorZavadski, S. M.-
dc.contributor.authorErmolenko, M. V.-
dc.date.accessioned2016-05-13T12:36:46Z-
dc.date.accessioned2017-07-27T12:27:23Z-
dc.date.available2016-05-13T12:36:46Z-
dc.date.available2017-07-27T12:27:23Z-
dc.date.issued2015-
dc.identifier.citationGolosov, D. A. Optical and Tribological Properties of PVD/CVD Diamond -like Carbon Films / Golosov D. A., Melnikov S. N., Zavadski S. M., Ermolenko M. V. // Plasma Physics and Technology . – 2015. – Vol. 2 . - № 1. – p. 17 – 20.ru_RU
dc.identifier.issn2336-2626 (Print)-
dc.identifier.issnISSN: 2336-2634 (Online)-
dc.identifier.urihttps://libeldoc.bsuir.by/handle/123456789/6777-
dc.description.abstractThe optical and tribological properties of diamond-like carbon (DLC) films deposited by the combination of magnetron sputtering of graphite and plasmochemical dissociation of methane were studied. It was established that at methane concentration in the gas mixture Ar/CH4 at about 5–10 % the formation of DLC films with refraction index n 2.0, microhardness larger than 1000 HK and friction coefficient of 0.06–0.08 becomes possible.ru_RU
dc.language.isoenru_RU
dc.publisherCzech Technical University in Prague,ru_RU
dc.subjectпубликации ученыхru_RU
dc.subjectdiamond-like carbonru_RU
dc.subjectmagnetron sputteringru_RU
dc.subjectmethane dissociationru_RU
dc.subjectrefractive indexru_RU
dc.subjectfriction coefficientru_RU
dc.titleOptical and Tribological Properties of PVD/CVD Diamond -like Carbon Filmsru_RU
dc.typeArticleru_RU
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