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Please use this identifier to cite or link to this item: https://libeldoc.bsuir.by/handle/123456789/28415
Title: Mechanical properties of MEMS components based on anodic aluminum oxide
Authors: Biran, S.
Korotkevich, D.
Korotkevich, A.
Keywords: материалы конференций
mechanical properties
MEMS
anodic aluminum oxide
Issue Date: 2017
Publisher: БГУИР
Citation: Biran, S. Mechanical properties of MEMS components based on anodic aluminum oxide / S. Biran, D. Korotkevich, A. Korotkevich // Nano-design, technology, computer simulations : proceedings of 17th International workshop on new approaches to high –tech (26-27 October, 2017). – Minsk : BSUIR, 2017. – С. 46 - 49.
URI: https://libeldoc.bsuir.by/handle/123456789/28415
Appears in Collections:NDTCS 2017

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