Browsing by Subject automatic layout inspection
Showing results 1 to 2 of 2
Issue Date | Title | Author(s) |
2021 | Software Control System for Equipment of Integrated Circuit Layout Inspection | Doudkin, A.; Voronov, A.; Ganchenko, V.; Дудкин, А. А.; Ганченко, В. В.; Воронов, А. А. |
2021 | Software for the design of optical control systems for the manufacture of precision microelectronics equipment | Doudkin, A. A.; Voronov, A. A.; Ganchenko, V. V.; Avakov, S. M. |