|Title:||Software Control System for Equipment of Integrated Circuit Layout Inspection|
Дудкин, А. А.
Ганченко, В. В.
Воронов, А. А.
|Keywords:||материалы конференций;conference proceedings;image processing;VLSI;automatic layout inspection;control and measurement equipment|
|Citation:||Doudkin, A. Software Control System for Equipment of Integrated Circuit Layout Inspection / Doudkin A., Voronov A., Ganchenko V. // Pattern Recognition and Information Processing (PRIP'2021) = Распознавание образов и обработка информации (2021) : Proceedings of the 15th International Conference, 21–24 Sept. 2021, Minsk, Belarus / United Institute of Informatics Problems of the National Academy of Sciences of Belarus. – Minsk, 2021. – P. 236–240.|
|Abstract:||This paper describes the main functions and architecture of software control system for equipment of critical sizes inspection for layouts of integrated circuit on basis of computer vision. Advantages of the developed architecture are described, as well as its application for image processing of integrated circuit layouts. The system allows identifying effectively defects what it is especially important for Very large-scale integration manufacturing based on submicron technology.|
|Appears in Collections:||Pattern Recognition and Information Processing (PRIP'2021) = Распознавание образов и обработка информации (2021)|
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.