Просмотр собрания по группе - Авторы Solodukha, V. A.
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| Дата публикации | Название | Автор(ы) |
| 2017 | Depth Measurement of Nanoscale Damage to the Surface of Silicon Wafers in the Production of Submicron Integrated Microcircuits by Auger Spectroscopy Method | Solodukha, V. A.; Shvedov, S. V.; Chyhir, R. R.; Petlitsky, A. N. |
| 2017 | Depth Measurement of the Nano-dimensional Surface Damages of the Silicon Wafers in Production of the Submicron Integrated Circuits | Solodukha, V. A.; Shvedov, S. V.; Chyhir, R. R.; Petlitsky, A. N.; Petlitskaya, T. V. |
| 2017 | Reliability Assessment of the Nano-dimensional Dielectrics of the Submicron Microcircuits | Solodukha, V. A.; Shvedov, S. V.; Chyhir, R. R.; Petlitsky, A. N.; Filipenya, V. A. |
