https://libeldoc.bsuir.by/handle/123456789/28807| Title: | Depth Measurement of the Nano-dimensional Surface Damages of the Silicon Wafers in Production of the Submicron Integrated Circuits |
| Authors: | Solodukha, V. A. Shvedov, S. V. Chyhir, R. R. Petlitsky, A. N. Petlitskaya, T. V. |
| Keywords: | публикации ученых |
| Issue Date: | 2017 |
| Publisher: | Zakopane |
| Citation: | Depth Measurement of the Nano-dimensional Surface Damages of the Silicon Wafers in Production of the Submicron Integrated Circuits / V. A. Solodukha and other // 10th International Conference «New Electrical and Electronic Technologies and their Industrial Implementation» (June 27 – 30, 2017). – Zakopane. – Р. 25. |
| URI: | https://libeldoc.bsuir.by/handle/123456789/28807 |
| Appears in Collections: | Публикации в зарубежных изданиях |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Solodukha_Depth.pdf | 156 kB | Adobe PDF | View/Open |
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