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Please use this identifier to cite or link to this item: https://libeldoc.bsuir.by/handle/123456789/28807
Title: Depth Measurement of the Nano-dimensional Surface Damages of the Silicon Wafers in Production of the Submicron Integrated Circuits
Authors: Solodukha, V. A.
Shvedov, S. V.
Chyhir, R. R.
Petlitsky, A. N.
Petlitskaya, T. V.
Keywords: публикации ученых
Issue Date: 2017
Publisher: Zakopane, Poland
Citation: Depth Measurement of the Nano-dimensional Surface Damages of the Silicon Wafers in Production of the Submicron Integrated Circuits / V. A. Solodukha and other // 10th International Conference «New Electrical and Electronic Technologies and their Industrial Implementation» (June 27 – 30, 2017). – Zakopane. – Р. 25.
URI: https://libeldoc.bsuir.by/handle/123456789/28807
Appears in Collections:Публикации в зарубежных изданиях

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