Browsing by Author Shvedov, S. V.
Showing results 1 to 4 of 4
| Issue Date | Title | Author(s) |
| 2017 | Depth Measurement of Nanoscale Damage to the Surface of Silicon Wafers in the Production of Submicron Integrated Microcircuits by Auger Spectroscopy Method | Solodukha, V. A.; Shvedov, S. V.; Chyhir, R. R.; Petlitsky, A. N. |
| 2017 | Depth Measurement of the Nano-dimensional Surface Damages of the Silicon Wafers in Production of the Submicron Integrated Circuits | Solodukha, V. A.; Shvedov, S. V.; Chyhir, R. R.; Petlitsky, A. N.; Petlitskaya, T. V. |
| 2017 | Optical interconnects between silicon chips based on light-emitting diodes on nanostructured silicon | Leshok, A. A.; Dolbik, A. V.; Le Dinh Via; Matskevicha, A. I.; Vysotskii, V. B.; Shvedov, S. V. |
| 2017 | Reliability Assessment of the Nano-dimensional Dielectrics of the Submicron Microcircuits | Solodukha, V. A.; Shvedov, S. V.; Chyhir, R. R.; Petlitsky, A. N.; Filipenya, V. A. |
