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Browsing by Author Solodukha, V. A.

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Issue DateTitleAuthor(s)
2017Depth Measurement of Nanoscale Damage to the Surface of Silicon Wafers in the Production of Submicron Integrated Microcircuits by Auger Spectroscopy MethodSolodukha, V. A.; Shvedov, S. V.; Chyhir, R. R.; Petlitsky, A. N.
2017Depth Measurement of the Nano-dimensional Surface Damages of the Silicon Wafers in Production of the Submicron Integrated CircuitsSolodukha, V. A.; Shvedov, S. V.; Chyhir, R. R.; Petlitsky, A. N.; Petlitskaya, T. V.
2017Reliability Assessment of the Nano-dimensional Dielectrics of the Submicron MicrocircuitsSolodukha, V. A.; Shvedov, S. V.; Chyhir, R. R.; Petlitsky, A. N.; Filipenya, V. A.