Theoretical analysis of low vacuum microwave discharge exciting and maintaining conditions in resonator type plasmatron

Abstract

The efficiency of a cavity microwave resonator using for getting large volume (more than 4000 cm3) low vacuum plasma for group treatment of products in the microelectronics technology has been evaluated. The results showed that the value of electric field breakdown intensity about E0 ≈ 200 V/cm in a resonator system for low vacuum can be already achieved at a microwave power higher than 50 W. The conditions of preserving resonating properties at exciting plasma with a volume of 9000 cm3 in resonator and in case of placing a various number of silicon wafers in the microwave discharge have been analyzed.