Usage of cobalt oxide particles as precursor for FEBID: Ab initio study

Abstract

The investigation of the fragmentation of Co18O n (n = 0–17) particles is presented with the aim to demonstrate that the mentioned particles could be used as precursors for focused electron beam induced deposition (FEBID). The shape of Co18 and Co18O n particles is confirmed. The study validates that oxygen atoms stabilize Co nanoparticles. The thermal and chemical stabilities, toxicity, hardness and softness of the particles under study are determined. It is found that the absorption of oxygen atoms could occur when the number of oxygen atoms is larger than the number of external Co atoms. A low volatility and high sticking on the surface probability of Co18O17 particles are proposed referring to the obtained results. The results of the calculated susceptibility exhibit Co18O n particles as paramagnetics with some exceptions. The value of magnetic susceptibility of Co18O12 is the largest one among the particle under investigation. Referring to the obtained results several most effective reactions of fragmentation are proposed and their appearance energy is evaluated. The obtained results also evidenced that Co18O17 nanoparticle shows great potential to be used as a precursor for FEBID.