https://libeldoc.bsuir.by/handle/123456789/29228| Title: | Influence of target-substrate distance during pulsed laser deposition on properties of LiNbO3 thin films |
| Authors: | Vakulov, Z. E. Zamburg, E. G. Golosov, D. A. Zavadski, S.M. Dostanko, A. P. Miakonkikh, A. V. Klemente, I. E. Rudenko, K. V. Ageev, O. A. |
| Keywords: | публикации ученых;практическая эффективность;современная математика;рациональность |
| Issue Date: | 2017 |
| Citation: | Influence of target-substrate distance during pulsed laser deposition on properties of LiNbO3 thin films / Z. E. Vakulov and others // Journal of Physics: Conf. Series. – 2017. – Vol. 917. – Рр. 032024. |
| Abstract: | This paper shows the results of studying the influence of target-substrate distance during pulsed laser deposition on electrical properties of LiNbO3 thin films. It has been shown that changing the target-substrate distance we can obtain thin films with a different composition. EDX spectra indicate that the LiNbO3 thin films fabricated under 120 mm target-substrate distance depleted Nb (0.7 atm. %) compare to LiNbO3 films fabricated under 20 mm target-substrate distance (11.0 atm. %). Varying target-substrate distance in the range from 20 mm to 120 mm charge carrier mobility increasing from 24 cm2/Vcenterdots to 395 cm2/Vcenterdots and concentration of charge carrier decreasing from 3centerdot1013 cm-3 to 1centerdot1012 cm-3. Obtained results can be used under development and fabrication of integral acousto-optic and surface acoustic wave (SAW) devices. |
| URI: | https://libeldoc.bsuir.by/handle/123456789/29228 |
| Appears in Collections: | Публикации в зарубежных изданиях |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Vakulov_Influence.pdf | 1.09 MB | Adobe PDF | View/Open |
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