https://libeldoc.bsuir.by/handle/123456789/29058| Title: | Calculating and modeling of integrated displacement systems for precision equipment of micro- and nanoelectronics |
| Authors: | Dainiak, I. V. Kuznetsov, V. Karpovich, S. E. |
| Keywords: | материалы конференций;integrated displacement systems;precision equipment;microelectronics;nanoelectronics |
| Issue Date: | 2017 |
| Publisher: | БГУИР |
| Citation: | Dainiak, I. Calculating and modeling of integrated displacement systems for precision equipment of micro- and nanoelectronics / I. Dainiak, V. Kuznetsov, S. Karpovich // Nano-design, technology, computer simulations : proceedings of 17th International workshop on new approaches to high –tech (26-27 October, 2017). – Minsk : BSUIR, 2017. – С. 161 - 164. |
| URI: | https://libeldoc.bsuir.by/handle/123456789/29058 |
| Appears in Collections: | NDTCS 2017 |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Dainiak_Calculating.PDF | 403.44 kB | Adobe PDF | View/Open |
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