Skip navigation
Please use this identifier to cite or link to this item: https://libeldoc.bsuir.by/handle/123456789/29140
Title: Sol-gel coatings for photolithography on nanoporous anodic alumina and aluminum
Authors: Khoroshko, L. S.
Orekhovskaya, T. I.
Meledina, M. V.
Keywords: публикации ученых
microstructures fabrication
planar optoelectronics
Issue Date: 2017
Publisher: World Scientific Press, Singapore
Citation: Khoroshko, L. S. Sol-gel coatings for photolithography on nanoporous anodic alumina and aluminum / L.S. Khoroshko, T.I. Orekhovskaya, M.V. Meledina // Nanomeeting – 2017 Proceedings of International Conference in Physics, Chemistry and Application of Nanostructures. – Singapore: World Scientific Press, 2017. – Р. 398 – 401. – DOI: https://doi.org/10.1142/9789813224537_0092.
Abstract: The results of the patterned microstructures fabrication through electrochemical anodizing, sol-gel synthesis, photolithography and chemical etching are presented. The continuous xerogel films were used as a protective mask. They are good alternative to metal in photolithography. Perspectives of application of these structures in planar optoelectronics are discussed.
URI: https://libeldoc.bsuir.by/handle/123456789/29140
Appears in Collections:Публикации в зарубежных изданиях

Files in This Item:
File Description SizeFormat 
Khoroshko_Sol.pdf127,82 kBAdobe PDFView/Open
Show full item record


Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.