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Title: Sol-gel coatings for photolithography on nanoporous anodic alumina and aluminum
Authors: Khoroshko, L. S.
Orekhovskaya, T. I.
Meledina, M. V.
Keywords: публикации ученых;microstructures fabrication;planar optoelectronics
Issue Date: 2017
Publisher: World Scientific Press
Citation: Khoroshko, L. S. Sol-gel coatings for photolithography on nanoporous anodic alumina and aluminum / L.S. Khoroshko, T.I. Orekhovskaya, M.V. Meledina // Nanomeeting – 2017 Proceedings of International Conference in Physics, Chemistry and Application of Nanostructures. – Singapore: World Scientific Press, 2017. – Р. 398 – 401. – DOI:
Abstract: The results of the patterned microstructures fabrication through electrochemical anodizing, sol-gel synthesis, photolithography and chemical etching are presented. The continuous xerogel films were used as a protective mask. They are good alternative to metal in photolithography. Perspectives of application of these structures in planar optoelectronics are discussed.
Appears in Collections:Публикации в зарубежных изданиях

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