Scanning probe microscopy as a comprehensive microanalytical instrumentary

Abstract

This review briefly presents some results of collaborative work on new methods of microanalysis and nanolithography based on scanning probe microscopy and obtained during long-term coopera- tion between Center of Nanoelectronics and Novel Materials of Belarusian State University of In- formatics (Belarus) and Radioelectronics and Bergische Universitдt Wuppertal (Germany).