|Title:||C-V characterization and electric parameters of ZrO2 received by UV stimulated plasma anodizing|
Borisenko, V. E.
Борисенко, В. Е.
|Publisher:||IOP Publishing, Great Britain|
|Citation:||Kushitashvili, Z. C-V characterization and electric parameters of ZrO2 received by UV stimulated plasma anodizing / Z. Kushitashvili, A. Bibilashvili, V. Borisenko // IOP Conference Series: Earth and Environmental Science. – 2019. – Vol. 362, № 12. – P. 012070-1-012070-8. - DOI: 10.1088/1755 1315/362/1/012070.|
|Abstract:||Low temperature technologies creating metals oxides are a promising solution for formation integral circuit elements. In this report the electric properties of zirconia (ZrO2) received by low temperature (~400oC) UV stimulated plasma anodizing have been investigated. Zirconia is a potential high-k dielectric material with potential applications as a gate insulator in transistors. This dielectric distinguished by good electric parameters. For this purpose, we used C-V characterization technique and calculate dielectric constant, flatband voltage, threshold voltage, bulk potential, work function, oxide effective charge, charge concentration. The C-V measurement was carried out on Keithley Instrument Semiconductor Parameter Analyzer 4200, oxide thickness was measured by reflectometer – MprobeVis System.|
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