https://libeldoc.bsuir.by/handle/123456789/64807| Title: | Influence of pretreatment methods on the formation of thin-film nickel electrodes for capacitive sensors |
| Authors: | Panfilenko, E. D. Provlockaya, D. V. |
| Keywords: | материалы конференций;thin films;nickel;sitall;ion-beam sputtering;atmospheric pressure plasma;surface cleaning;capacitive sensors |
| Issue Date: | 2026 |
| Publisher: | БГУИР |
| Citation: | Panfilenko, E. D. Influence of pretreatment methods on the formation of thin-film nickel electrodes for capacitive sensors / E. D. Panfilenko, D. V. Provlockaya // Электронные системы и технологии : сборник материалов 62-й научной конференции аспирантов, магистрантов и студентов БГУИР, Минск, 13–17 апреля 2026 г. / Белорусский государственный университет информатики и радиоэлектроники ; редкол.: П. В. Камлач [и др.]. – Минск, 2026. – С. 831–835. |
| Abstract: | The paper investigates the influence of pretreatment methods for sitall ST-50-1-1-0,6 substrates surface on the subsequent formation of thin-film nickel electrodes for capacitive sensors for heavy metal ions detection in water. A comparison of two cleaning methods was carried out: ion-beam cleaning in vacuum and treatment in a dielectric barrier discharge plasma torch at atmospheric pressure. Optimal cleaning regimes ensuring maximum adhesion and quality of the formed films were established. Nickel films with a thickness of 100 nm were obtained by ion-beam sputtering; their optical properties and surface morphology were studied. |
| URI: | https://libeldoc.bsuir.by/handle/123456789/64807 |
| Appears in Collections: | Электронные системы и технологии : материалы 62-й конференции аспирантов, магистрантов и студентов (2026) |
| File | Description | Size | Format | |
|---|---|---|---|---|
| Panfilenko_Influence.pdf | 633.96 kB | Adobe PDF | View/Open |
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