Issue Date | Title | Author(s) |
2019 | Investigation of method of dynamic microwave power redistribution in a resonator-type plasmatron | Madveika, S. I.; Bordusov, S. V.; Zemlyakov, A. S.; Lushakova, M. S. |
2018 | Investigation of method of dynamic microwave power redistribution in a resonator-type plasmatron | Madveika, S. I.; Bordusov, S. V.; Zemlyakov, A.; Lushakova, M. S. |
2016 | Investigation of microwave energy distribution character in a resonator type plasmatron | Madveika, S. I.; Bordusov, S. V.; Dostanko, A. P. |
2018 | Investigation of peculiarities of the discharge excitation with hollow cathode effect in N2 in a tube electrode | Bordusov, S. V.; Bozhko, A. I.; Madveika, S. I.; Tihon, O. I.; Barouski, I. |
2018 | Investigation of peculiarities of the discharge excitation with hollow cathode effect in N2 in a tube electrode | Bordusov, S. V.; Bozhko, A. I.; Madveika, S. I.; Tihon, O. I.; Barouski, I. |
2017 | Investigation of pulse glow discharge excitation modes in N2 in a hollow cylindrical combined cathode | Bordusov, S. V.; Madveika, S. I.; Bozhko, A. I.; Tihon, O. I. |
2019 | Investigation of silicon wafers' influence on the local microwave power values in a resonator-type plasmatron | Madveika, S. I.; Bordusov, S. V.; Lushakova, M. S.; Tihon, O. I. |
2015 | Investigation of the stability of microwave discharge in oxygen in a resonator type plasmatron | Bordusov, S. V.; Madveika, S. I.; Lushakova, M. S. |
2019 | Output current control system of high voltage electric pulse generator for plasma excitation | Godun, D. V.; Bordusov, S. V.; Budzko, G. P. |
2018 | Output current control system of high voltage electric pulse generator for plasma excitation | Godun, D. V.; Bordusov, S. V.; Budzko, G. P. |
2017 | The influence of microwave CF4 plasma activation on the characteristics of reactive ion etching of mono-Si | Bordusov, S. V.; Madveika, S.; Lushakova, M.; Kovalchuk, N. |
2015 | Theoretical analysis of low vacuum microwave discharge exciting and maintaining conditions in resonator type plasmatron | Madveika, S. I.; Bordusov, S. V. |